SMC offers a wide variety of high vacuum angle valves in aluminum or stainless steel bodies to suit the application. The valves are available with CF, K, and KF type flanges, a variety of seal materials, optional heaters and position switches. The valves are operated pneumatically, and manual type valves are also available. Series XL aluminum body angle valves are lightweight and compact, offer a uniform baking temperature, high fluorine resistance, low outgassing, little heavy metal contamination, and the longest service life on the market (2 million cycles). Series XM angle and series XY inline valves are precision cast of SCS13 stainless steel. Their unified composition prevents gas accumulation. Series XM and XY also boast a long 2 million cycle service life. Request catalog N403 for series XL and ES140-5 for series XM/XY valves.